前後差動方式による多次元変位計測に関する研究 : 第1報, 測定体が鏡面の場合

概要

論文の詳細を見る
According to the increasing of recording density of optical disks, it is widely demanded a multidimensional displacement sensor which can measure in-process a mechanical characteristics of the optical disk such as displacement and inclination. The astigmatic focus error detection is a conventional and typical method to measure the characteristics, however it can measure only one dimension of the displacement. In this study, it is examined that the measuring method of the multi-dimensional displacement, which can measure not only horizontal displacement, but also tangential and radial inclinations of a specimen with the mirror surface simultaneously. Also it is invented the differental optical detection method that uses a pair of quadrant opto-electronic detectors placed at the conjugate positions of the focal plane of the detection lens. In the body of the text, the measurement Principles and the basic analysis of the optical system with ray tracing are described first, then the effectiveness of this principle and method are confirmed with the results of simulations and experiments.
一般社団法人日本機械学会の論文
1999-02-25