前後差動方式による多次元変位計測に関する研究 : 第2報, 光ディスク媒体の機械特性測定への適用 : 機械力学,計測,自動制御

概要

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Because of the increased recording density of optical disks, it is widely demanded methods for estimating mechanical characteristics of the optical disk such as displacement and inclination. This study relates to a method for measuring a multi-dimensional displacement that measures not only displacement, but also tangential and radial inclinations of the optical disk transmitting laser light simultaneously. We propose a differential optical detection method using a pair of quadrant opto-electronic detectors placed at the conjugate positions of the focal plane of a detection lens, and an optical system using a spatial filter for splitting reflection from a surface of a recording layer and a surface of a transparent substrate of the optical disk. The optical system is not effected on a defect of the substrate surface. The optical head for an experiment was prepared in a simulation of the optical system with ray tracing. The experiments have shown that the principle of the method is useful for measuring the multi-dimensional displacement of the optical disk.
一般社団法人日本機械学会の論文
2001-05-25