ホウ素イオン注入処理を施したSUS304, Si_3N_4, WC-9%Coの摩擦磨耗特性評価

概要

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Experiments using SUS304, Si_3N_4, WC-9%Co as well as boron-ion-implanted SUS304, Si_3N_4 and WC-9%Co were performed with a self-manufactured reciprocating type tribology testing apparatus. The tribology tests were carried out under unlubricated conditions in air at room temperature. Compared with the unimplanted SUS304, the hardness of the boron-ion-implanted SUS304 increased. No iron borides were, however, identified in the boron-ion-implanted SUS304. In addition, neither the formation of new chemical compounds nor significant hardening was observed in Si_3N_4 and WC-9%Co. The coefficients of friction of the boron-ion-implanted Si_2N_4 and WC-9%Co indicated higher values than those of unimplanted Si_2N_4 and WC-9%Co, respectively. From the experimental results, some tribological improvements were obtained by the boron ion implantation treatment into SUS304. On the other hand, the boron ion implantation into Si_3N_4 and WC-9%Co does not seem to be a satisfactory treatment for improving their tribological properties. In particular, the wear scar of the boron-ion-implanted Si_3N_4 was significantly enlarged. This could be related to the microscopic surface damages produced by sputtering during the ion implanting process.
社団法人日本材料学会の論文
1993-02-15