Alのイオンプレーティングにおける処理条件とその被覆の諸性質

概要

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Aluminum films of 1-20 μm in thickness were ion-plated on steel substrates under various plating conditions using a diode system with electron beam heating of source materials.<BR>Graphite hearth liner mounted on water cooled copper crucible for melting of aluminum source material was particularly useful for producing thick aluminum coatings.<BR>Ion-plated aluminum films at process pressure above 5 × 10<SUP>-3</SUP> Torr showed considerable amounts of preferred orientation in (200) plane. The decrease of porosity resulted in a increase in film thickness and any pin-holes were not detected in films of approximately 20 μm in thickness. The ion-plated aluminum coatings above 3μm in thickness required the spray time in excess of 48 hours for rust starting in salt spray testing and thus the satisfactory corrosion resistance was confirmed. The ion-plated aluminum coatings showed far more excellent adhesion to the steel substrates than the coatings obtained by conventional vacuum vapor deposition.
日本真空協会の論文