ゾルゲル法からのLi_<1+x>Ti_<2-x>O_4薄膜の作製と電気的性質(酸化物系導電セラミックス)(<特集>導電性セラミックス)

概要

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A high-conductivity oxide thin film of the spinel type Li1+xTi2-xO4 (0≤x≤1/3) was prepared by the sol-gel method. Lithium acetate and tetra-n-butyl orthotitanate were used as raw materials, and diethanolamine was used as a solvent. A thin film was prepared by dip-coating of silica glass substrates into a solution. The composition depended on the atmosphere of synthesis. The insulator composition with x equal to 1/3 was obtained by heat-treatment at 750°C in the air. The conductive compositions with x equal to 0.2 to 0.05 were obtained by heat-treatment at 750°C in the H2 atmosphere. The average film thickness was an 1.2μm. The conductivity increased with decreasing x. When x is 0.05, logσ was 2.1 (S/cm). The charge carrier in the thin film, was confirmed to be electron by the Seebeck coefficient measurements. The electric conduction of the thin film showed a higher value than that of powder of the same composition.
社団法人日本セラミックス協会の論文
1989-10-01