標準CMOSプロセスを用いたμTAS向け偏光検出イメージセンサ

概要

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We have proposed and demonstrated a technology for CMOS photosensor / image sensor that will be implemented onto μTAS. Polarization-analyzing CMOS sensor was realized with an idea of monolithically-embedded on-chip polarizer. The on-chip polarizer was configured with a metal wiring layer in standard CMOS fabrication technology. We describe concept, design of a polarization-analyzing CMOS photosensor array and a polarization-analyzing CMOS image sensor. We characterized performances of the fabricated sensors and confirmed that the proposed technology is feasible CMOS-based on-chip polarization analysis. We also successfully demonstrated polarimetric measurements of chiral solutions using the fabricated sensors.
2009-08-01