Ion-Implanted B Concentration Profiles in Ge
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概要
- 論文の詳細を見る
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2007-03-15
著者
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Takagi Shin-ichi
Mirai-aset
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YAMASHITA Yoshimi
MIRAI-ASET
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IKEDA Keiji
MIRAI-ASET
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SUZUKI Kunihiro
MIRAI-ASET
関連論文
- Deformation Induced Holes in Ge-Rich SiGe-on-Insulator and Ge-on-Insulator Substrates Fabricated by Ge Condensation Process
- High Mobility Fully-Depleted Germanium-on-Insulator pMOSFET with 32-nm-Thick Ge Channel Layer Formed by Ge-Condensation Technique
- Performance Enhancement under High-Temperature Operation and Physical Origin of Mobility Characteristics in Ge-rich strained SiGe-on-Insulator pMOSFETs
- Impact of Gradual Source/Drain Impurity Profiles on Performance of Germanium Channel Double-Gated pMISFETs
- High mobility Ge channel metal source/drain pMOSFETs with nickel fully silicided gate
- Ion-Implanted B Concentration Profiles in Ge
- Quantitative Evaluation of Interface Trap Density in Ge-MIS Interfaces
- Modulation of NiGe/Ge Schottky Barrier Height by Dopant and Sulfur Segregation during Ni Germanidation for Metal S/D Ge MOSFETs
- Abrupt Lateral-Source Heterostructures with Relaxed/Strained Layers for Ballistic Complementary Metal Oxide Semiconductor Transistors Fabricated by Local O+ Ion-Induced Relaxation Technique of Strained Substrates
- Hole-Mobility and Drive-Current Enhancement in Ge-Rich Strained Silicon--Germanium Wire Tri-Gate Metal--Oxide--Semiconductor Field-Effect Transistors with Nickel-Germanosilicide Metal Source and Drain
- Single Source Heterojunction Metal--Oxide--Semiconductor Transistors for Quasi-Ballistic Devices: Optimization of Source Heterostructures and Electron Velocity Characteristics at Low Temperature
- Variation of Threshold Voltage in Strained Si Metal–Oxide–Semiconductor Field-Effect Transistors Induced by Non-uniform Strain Distribution in Strained-Si Channels on Silicon–Germanium-on-Insulator Substrates
- Influences of Elastic and Inelastic Scatterings on Ballistic Transport in MOSFETs
- Analysis of Microstructures in SiGe Buffer Layers on Silicon-on-Insulator Substrates
- Ion-Implanted B Concentration Profiles in Ge