Quantitative Evaluation of Quantum Mechanical Influence on Flat-Band Capacitance of Poly-Si/SiO_2/Si Substrate System and the Impact of Oxide Charge Density

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概要

• 論文の詳細を見る
• 2000-08-28

著者

• SHIMIZU Akira

  Faculty of Engineering, Yamanashi University

• Omura Yasuhisa

  High-technology Research Center

• Shimizu Akira

  Faculty Of Engineering Kansai University

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