Stress in Pulsed-Laser-Crystallized Silicon Films

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概要

• 論文の詳細を見る
• Publication Office, Japanese Journal of Applied Physics, Faculty of Science, University of Tokyoの論文
• 2001-02-01

著者

• HIGASHI Seiichiro

  Base Technology Research Center, Seiko Epson Corp.

• Sameshima T

  Tokyo Univ. Agriculture And Technol. Koganei Jpn

• SAMESHIMA Toshiyuki

  Department of Electrical and Electric Engineering, Tokyo University of Agriculture and Technology

• Ando Nobuyuki

  Base Technology Research Center Seiko Epson Corp.

• Ando Nobuyuki

  Department Of Food Science And Technology Faculty Of Agriculture Kyoto University

• KAMISAKO Koichi

  Department of Engineering, Tokyo University of Agriculture and Technology

関連論文

• Low-Temperature Formation of Device-Quality SiO_2/Si Interfaces Using Electron Cyclotron Resonance Plasma-Enhanced Chemical Vapor Deposition
• Device Simulation of Carrier Transport through Grain Boundaries in Lightly Doped Polysilicon Films and Dependence on Dopant Density : Semiconductors
• Application of Plasma Jet Crystallization Technique to Fabrication of Thin-Film Transistor
• Action of Glutaminase in a Model System of a Soy Sauce Fermentation(Microbiology & Fermentation Industry)
• Pulsed-Laser-Induced Microcrystallization and Amorphization of Silicon Thin Films
• Defect Reduction Treatment for Plasma-Tetraethylorthosilicate-SiO_2 by High-Pressure H_2O Vapor Heat Treatment
• Stress in Pulsed-Laser-Crystallized Silicon Films
• Tantalum Oxide Films Formed by UV Photo-CVD Using Ozone and TaCl_5
• Gas Phase Reaction Kinetics in Mercury-Photosensitized Decomposition of SiH_4 : Techniques, Instrumentations and Measurement
• Analysis of Deposition Rate Distribution in the Photo-CVD of a-Si by a Unified Reactor with a Lamp
• Experimental Study of the Hyper-Raman Scattering Due to Raman Inactive Lattice Vibration in SrTiO_3
• Observation of the Phonon Polariton in the Centrosymmetric Crystal of SrTiO_3 by Hyper-Raman Scattering
• Observation of Hyper-Raman Scattering Spectra Due to Lattice Vibration in SrTio_3
• Stress in Pulsed-Laser-Crystallized Silicon Films
• Pulsed-Laser-Induced Microcrystallization and Amorphization of Silicon Thin Films
• Defect Reduction Treatment for Plasma–Tetraethylorthosilicate–SiO2 by High-Pressure H2O Vapor Heat Treatment
• Experimental Study on Surface-Orientation/Strain Dependence of Phonon Confinement Effects and Band Structure Modulation in Two-Dimensional Si Layers
• Application of Plasma Jet Crystallization Technique to Fabrication of Thin-Film Transistor

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