Fabrication of $1 \times 8$ Multimode-Interference Optical Power Splitter based on InP Using CH4/H2 Reactive Ion Etching
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概要
- 論文の詳細を見る
$1 \times 8$ multimode-interference (MMI) power splitters with a weakly guided ridge structure based on an InGaAsP/InP material for 1.55 $\mu$m operations were designed and fabricated. To determine the optimum etching condition of InP in CH4/H2 plasma for the formation of MMI power splitters, the effects of etching parameters, such as flow rates of constituent gases, rf power, and process pressure on the etch rate and surface morphology were investigated. The fabricated 3-$\mu$m-wide adjacent straight waveguides have propagation losses of 2.91 dB/cm at 1.55 $\mu$m for transverse electric (TE) polarization. The device performances in terms of the thickness of the upper cladding layer were theoretically and experimentally compared. The polarization dependence of the MMI power splitters was investigated. For TE [transverse magnetic (TM)] polarization, the excess loss of the devices at an operating wavelength of 1.55 $\mu$m was 1.02 dB (1.95 dB) and the splitting ratio was 0.68 dB (1.13 dB).
- Publication Office, Japanese Journal of Applied Physics, Faculty of Science, University of Tokyoの論文
- 2001-02-15
著者
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Choi Seok
Department of Physiology, Chosun University College of Medicine
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Lee Yong
Department Of Information And Communications Kwangju Institute Of Science And Technology
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Lee Yong
Department Of Agricultural Chemistry Division Of Applied Life Science Graduate School Gyeongsang Nat
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YU Jae
Department of Advanced Materials Engineering, Hoseo University
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Yu Jae
Department Of Information And Communications Kwangju Institute Of Science And Technology
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Moon Jeong
Department of Information and Communications, Kwangju Institute of Science and Technology, 1 Oryong-
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Choi Seok
Department Of Physiology College Of Medicine Chosun University
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Moon Jeong
Department Of Information And Communications Kwangju Institute Of Science And Technology
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Choi Seok
Department Of Information And Communications Kwangju Institute Of Science And Technology
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Lee Yong
Depart. Of Oncology Yonsei Univ. Wonju College Of Medicine
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Moon Jeong
Department of Chemical Engineering, Korea Advanced Institute of Science and Technology
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