Grain Size Control of Bi-Substituted Garnet Films Crystallized by Multi-Step Rapid Thermal Annealing for Magneto-Optical Disks
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概要
- 論文の詳細を見る
The sputtered Bi-substituted iron garnet films of improved microstructures are successfully grown using the optimized multi-step rapid thermal annealing (MSRTA). The concepts of the incubation time and the relaxation time in the MSRTA are applied to obtain good microstructures of garnet films. By repeating the optimized thermal cycle many times, the high density of nucleated grains can be obtained, and the grain size can be forced to be as small as it can be. This optimized MSRTA leads to a finer grain size of less than 0.1μm and better surface morphology with higher grain density than a conventional annealing method. The crystallized sample shows good squareness and large remnant Faraday rotation.
- 社団法人応用物理学会の論文
- 1993-12-15
著者
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KIM Hyeon
Department of Preventive Medicine, Yonsei University College of Medicine
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LEE Sang
Department of Pulmonary and Critical Care Medicine, Gachon University, Gil Medical Center
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LEE Yong
Department of Materials Science & Engineering, Sungkyunkwan University
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Lee Sang
Department Of Advanced Materials Science And Engineering Mokpo National University
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Kim Hyeon
Department Of Industrial Toxicology Industrial Health Researchinstitute Korea Industrial Safety Corp
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Lee Yong
Department Of Agricultural Chemistry Division Of Applied Life Science Graduate School Gyeongsang Nat
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Lee Yong
Department Of Physics Korea Advanced Institute Of Science And Technology
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Kim Hyeon
Department Of Physics Korea Advanced Institute Of Science And Technology
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Lee Yong
Depart. Of Oncology Yonsei Univ. Wonju College Of Medicine
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LEE Sang
Department of Acupuncture & Moxibustion, College of Oriental Medicine, Kyung Hee University
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