Yabata Atsushi | VLSI R&D Center, Electronic Devices Group, Oki Electric Industry Co., Ltd
スポンサーリンク
概要
関連著者
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IKEGAMI Naokatsu
VLSI R〓D Center, Oki Electric Industry Co., Ltd.
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KANAMORI Jun
VLSI R&D Center, Oki Electric Industry Co., Ltd.
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Kanamori J
Vlsi Research And Development Center Oki Electric Industry Co. Ltd.
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Kanamori Jun
Vlsi R&d Center Oki Electric Industry Co. Ltd.
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Yabata Atsushi
VLSI Research and Development Center, Oki Electric Industry Co., Ltd, 550-1 Higashiasakawa, Hachioji
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Yabata Atsushi
Vlsi Research And Development Center Oki Electric Industry Co. Ltd.
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Ikegami Naokatsu
Vlsi R&d Center Oki Electric Industry Co. Ltd.
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Yabata Atsushi
VLSI R&D Center, Electronic Devices Group, Oki Electric Industry Co., Ltd
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HORIIKE Yasuhiro
Department of Electrical Engineering, Toyo University
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Taino Mitsuhiko
Kek High Energy Accelerator Research Organization
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Hirashita N
Oki Electric Industry Co. Ltd. Vlsi R&d Center
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Hirashita Norio
Vlsi Research And Development Center Oki Electric Industry Co. Ltd.
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Hirashita Norio
Vlsi R&d Center Oki Electric Industry Co. Ltd.
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MATSUI Tetsuyuki
Department of Physical Science, Graduate School of Engineering Science, Osaka University
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Horiike Yasuhiro
Department Of Materials Science The University Of Tokyo
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Horiike Yasuhiro
Department Of Electrical & Electronics Engineering Tokyo University
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Horiike Yasuhiro
Department Of Electrical Engineering Hiroshima University
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Matsui Toshiaki
Communication Research Laboratory Ministry Of Posts And Telecommunications
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Matsui T
Department Of Systems Innovation Graduate School Of Engineering Science Osaka University
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UCHIDA Hidetsugu
VLSI R&D Center, Oki Electric Industry Co., Ltd.
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Matsui Takayuki
Vlsi R&d Center Oki Electric Industry Co. Ltd.
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Liu Guo
VLSI Research and Development Center, Oki Electric Industry Co., Ltd, 550-1 Higashiasakawa, Hachioji
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Horiike Yasuhiro
Department Of Materials Engineering The University Of Tokyo
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Horiike Yasuhiro
Department Of Electrical And Electronics Engineering Toyo University:department Of Materials Science
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Horiike Yasuhiro
Toshiba Research And Development Center Integrated Circuit Laboratory
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Horiike Yasuhiro
Toyo University
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Takasaki Minoru
Kek High Energy Accelerator Research Organization
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Liu Guo
Vlsi Research And Development Center Oki Electric Industry Co. Ltd.
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Horiike Yasuhiro
Department Of Electrical & Electronics Engineering Toyo University
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UCHIDA Hidetsugu
VLSI R&D Center, Oki Electric Industry Co., Ltd.
著作論文
- Vertical Profile Control in Ultrahigh-Aspect-Ratio Contact Hole Etching with 0.05-µm-Diameter Range
- Characteristics of Very High-Aspect-Ratio Contact Hole Etching