UCHIDA Hidetsugu | VLSI R&D Center, Oki Electric Industry Co., Ltd.
スポンサーリンク
概要
関連著者
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Hirashita Norio
Vlsi Research And Development Center Oki Electric Industry Co. Ltd.
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Hirashita Norio
Vlsi R&d Center Oki Electric Industry Co. Ltd.
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UCHIDA Hidetsugu
VLSI R&D Center, Oki Electric Industry Co., Ltd.
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UCHIDA Hidetsugu
VLSI R&D Center, Oki Electric Industry Co., Ltd.
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Hirashita N
Oki Electric Industry Co. Ltd. Vlsi R&d Center
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Tokitoh Shunichi
VLSI Research and Development Center, Oki Electric Industry Co., Ltd.
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Tokitoh Shunichi
Vlsi Research And Development Center Oki Electric Industry Co. Ltd.
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IKEGAMI Naokatsu
VLSI R〓D Center, Oki Electric Industry Co., Ltd.
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Liu Guo-lin
Vlsi Research And Development Center Oki Electric Industry Co. Ltd.
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Ikeda S
Tohoku Univ. Sendai‐shi Jpn
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IKEDA Satoshi
VLSI R&D Center, Oki Electric Industry Co., Ltd.
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OKIHARA Masao
VLSI R&D Center, Oki Electric Industry Co., Ltd.
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Okihara Masao
Vlsi R&d Center Oki Electric Industry Co. Ltd.
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KANAMORI Jun
VLSI R&D Center, Oki Electric Industry Co., Ltd.
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Kanamori J
Vlsi Research And Development Center Oki Electric Industry Co. Ltd.
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Kanamori Jun
Vlsi R&d Center Oki Electric Industry Co. Ltd.
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Yabata Atsushi
VLSI Research and Development Center, Oki Electric Industry Co., Ltd, 550-1 Higashiasakawa, Hachioji
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Liu Guo
VLSI Research and Development Center, Oki Electric Industry Co., Ltd, 550-1 Higashiasakawa, Hachioji
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Uchida Hiroaki
Process Technology Center, Oki Electric Industry Co., Ltd.
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Okuno Yasuyuki
Process Technology Center, Oki Electric Industry Co., Ltd.
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Fushimi Kimihisa
Process Technology Center, Oki Electric Industry Co., Ltd.
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Sakaya Yoshihiro
Process Technology Center, Oki Electric Industry Co., Ltd.
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Okuno Yasuyuki
Process Technology Center Oki Electric Industry Co. Ltd.
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Yabata Atsushi
Vlsi Research And Development Center Oki Electric Industry Co. Ltd.
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Liu Guo
Vlsi Research And Development Center Oki Electric Industry Co. Ltd.
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Fushimi Kimihisa
Process Technology Center Oki Electric Industry Co. Ltd.
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Sakaya Yoshihiro
Process Technology Center Oki Electric Industry Co. Ltd.
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Ikegami Naokatsu
Vlsi R&d Center Oki Electric Industry Co. Ltd.
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IKEDA Satoshi
VLSI R&D Center, Oki Electric Industry Co., Ltd.
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Hirashita Norio
VLSI R&D Center, Oki Electric Industry Co., Ltd.
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OKIHARA Masao
VLSI R&D Center, Oki Electric Industry Co., Ltd.
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Yabata Atsushi
VLSI R&D Center, Electronic Devices Group, Oki Electric Industry Co., Ltd
著作論文
- Cross-sectional Transmission Electron Microscope Studies on Intrinsic Breakdown Spots of Thin Gate Oxides
- Vertical Profile Control in Ultrahigh-Aspect-Ratio Contact Hole Etching with 0.05-µm-Diameter Range
- Studies of Corrosive Outgasses from Via Holes Using Thermal Desorption Spectroscopy
- Thermal Desorption and Infrared Studies of Plasma-Enhanced Chemical Vapor Deposited SiO Films with Tetraethyiorthosilicate