Matsui Takayuki | Vlsi R&d Center Oki Electric Industry Co. Ltd.
スポンサーリンク
概要
関連著者
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KANAMORI Jun
VLSI R&D Center, Oki Electric Industry Co., Ltd.
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Kanamori Jun
Vlsi R&d Center Oki Electric Industry Co. Ltd.
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Matsui Takayuki
Vlsi R&d Center Oki Electric Industry Co. Ltd.
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Taino Mitsuhiko
Kek High Energy Accelerator Research Organization
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IKEGAMI Naokatsu
VLSI R〓D Center, Oki Electric Industry Co., Ltd.
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MATSUI Tetsuyuki
Department of Physical Science, Graduate School of Engineering Science, Osaka University
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Matsui Toshiaki
Communication Research Laboratory Ministry Of Posts And Telecommunications
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Matsui T
Department Of Systems Innovation Graduate School Of Engineering Science Osaka University
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Kanamori J
Vlsi Research And Development Center Oki Electric Industry Co. Ltd.
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Takasaki Minoru
Kek High Energy Accelerator Research Organization
著作論文
- Role of Oxygen in Poly-Si Etching by Cl_2/O_2 Plasmas
- Characteristics of Very High-Aspect-Ratio Contact Hole Etching
- Dry-Etching Mechanism of Sputtered Pb(Zr_Ti_x)O_3 Film
- Fine Contact Hole Etching in Magneto-Microwave Plasma