Matsui Takayuki | Vlsi R&d Center Oki Electric Industry Co. Ltd.
スポンサーリンク
概要
関連著者
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KANAMORI Jun
VLSI R&D Center, Oki Electric Industry Co., Ltd.
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Kanamori Jun
Vlsi R&d Center Oki Electric Industry Co. Ltd.
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Matsui Takayuki
Vlsi R&d Center Oki Electric Industry Co. Ltd.
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Taino Mitsuhiko
Kek High Energy Accelerator Research Organization
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IKEGAMI Naokatsu
VLSI R〓D Center, Oki Electric Industry Co., Ltd.
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MATSUI Tetsuyuki
Department of Physical Science, Graduate School of Engineering Science, Osaka University
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Matsui Toshiaki
Communication Research Laboratory Ministry Of Posts And Telecommunications
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Matsui T
Department Of Systems Innovation Graduate School Of Engineering Science Osaka University
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Kanamori J
Vlsi Research And Development Center Oki Electric Industry Co. Ltd.
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Takasaki Minoru
Kek High Energy Accelerator Research Organization
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Ikegami Naokatsu
Vlsi R&d Center Oki Electric Industry Co. Ltd.
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HORIIKE Yasuhiro
Department of Electrical Engineering, Toyo University
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Horiike Yasuhiro
Department Of Materials Science The University Of Tokyo
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Horiike Yasuhiro
Department Of Electrical & Electronics Engineering Tokyo University
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Horiike Yasuhiro
Department Of Electrical Engineering Hiroshima University
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Hashimoto J
Nagasaki Univ. Nagasaki Jpn
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OZAWA Nobuo
VLSI R&D Center, Oki Electric Industry Co., Ltd.
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Ozawa Nobuo
Vlsi R&d Center Oki Electric Industry Co. Ltd.
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MIYAKAWA Yasuhiro
VLSI R&D Center, Electronic Devices Group, Oki Electric Industry Co., Ltd.
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HASHIMOTO Jun
VLSI R&D Center, Electronic Devices Group, Oki Electric Industry Co., Ltd.
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Yabata Atsushi
VLSI Research and Development Center, Oki Electric Industry Co., Ltd, 550-1 Higashiasakawa, Hachioji
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Horiike Yasuhiro
Department Of Materials Engineering The University Of Tokyo
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Horiike Yasuhiro
Department Of Electrical And Electronics Engineering Toyo University:department Of Materials Science
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Horiike Yasuhiro
Toshiba Research And Development Center Integrated Circuit Laboratory
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Horiike Yasuhiro
Toyo University
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Yabata Atsushi
Vlsi Research And Development Center Oki Electric Industry Co. Ltd.
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Miyakawa Yasuhiro
Vlsi Research And Development Center Oki Electric Industry Co. Ltd.
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Horiike Yasuhiro
Department Of Electrical & Electronics Engineering Toyo University
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HASHIMOTO Jun
VLSI R&D Center, Oki Electric Industry Co., Ltd.
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Yabata Atsushi
VLSI R&D Center, Electronic Devices Group, Oki Electric Industry Co., Ltd
著作論文
- Role of Oxygen in Poly-Si Etching by Cl_2/O_2 Plasmas
- Characteristics of Very High-Aspect-Ratio Contact Hole Etching
- Dry-Etching Mechanism of Sputtered Pb(Zr_Ti_x)O_3 Film
- Fine Contact Hole Etching in Magneto-Microwave Plasma