KASE Masataka | Fujitsu Ltd.
スポンサーリンク
概要
関連著者
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KASE Masataka
Fujitsu Ltd.
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野平 博司
Musashi Institute Of Technology
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KATAOKA Yuji
Fujitsu Laboratories Ltd.
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KUSANO Eiji
Department of Internal Medicine, Division of Nephrology, Jichi Medical University
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HORIBE Hideo
Department of Materials Science and Engineering, Kochi National College of Technology
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Tagawa Seiichi
The Institute Of Scientific And Industrial Research
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Hattori Tetsuya
Depaetment Of Electrical And Electronic Engineering Tokyo Institute Of Technology
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Wang Yun
Ultratech Inc.
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YAMAMOTO Tomonari
Fujitsu Ltd.
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KUBO Tomohiro
Fujitsu Ltd.
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TALWAR Somit
Ultratech Inc.
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HATTORI Takeo
New Industry Creation Hatchery Center, Tohoku University
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SHINAGAWA Seiji
Musashi Institute of Technology
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Yamamoto Tomonari
Fujitsu Laboratories Ltd.
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Nohira Hiroshi
Faculty Of Engineering Musashi Institute Of Technology
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SHINAGAWA Seiji
Faculty of Engineering, Musashi Institute of Technology
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IKUTA Tetsuya
Fujitsu Ltd.
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HORI Mitsuaki
Fujitsu Ltd.
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OKAMOTO Hideyuki
Faculty of Engineering, Musashi Institute of Technology
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HATTORI Takeo
Faculty of Engineering, Musashi Institute of Technology
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Hattori T
New Industry Creation Hatchery Center Tohoku University
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KAWAMURA Kazuo
Fujitsu Laboratories Ltd.
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Nakazawa Hiroshi
New Industry Creation Hatchery Center Tohoku University
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Okamoto Hideyuki
Faculty Of Engineering Musashi Institute Of Technology
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Saiki Takashi
Fujitsu Limited Advanced Lsi Development Div.
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Umemoto Hironobu
Faculty Of Engineering Shizuoka University
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Hattori Takeo
Faculty Of Engineering Musashi Institute Of Technology
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Yamamoto Masashi
Department Of Applied Chemistry Tokyo University Of Science
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Umemoto Hironobu
Faculty of Engineering, Shizuoka University, 3-5-1 Johoku, Naka, Hamamatsu 432-8561, Japan
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Takao Kazuhisa
Tokyo Ohka Kogyo Co., Ltd., 7-8-16 Ichinomiya, Samukawa, Kanagawa 253-0111, Japan
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Kawamura Kazuo
Fujitsu Ltd., 50 Fuchigami, Akiruno, Tokyo 197-0833, Japan
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Inagaki Satoshi
Fujitsu Ltd., 50 Fuchigami, Akiruno, Tokyo 197-0833, Japan
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Nakamura Ryo
Fujitsu Ltd., 50 Fuchigami, Akiruno, Tokyo 197-0833, Japan
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Horibe Hideo
Department of Material Design Engineering, Graduate School of Engineering, Kanazawa Institute of Technology, 3-1 Yatsukaho, Hakusan, Ishikawa 924-0838, Japan
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Horibe Hideo
Department of Applied Chemistry, Kanazawa Institute of Technology, Hakusan, Ishikawa 924-0838, Japan
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Kataoka Yuji
Fujitsu Laboratories, 10-1 Morinosato Wakamiya, Atsugi, Kanagawa 243-0197, Japan
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Kusano Eiji
Department of Material Design Engineering, Graduate School of Engineering, Kanazawa Institute of Technology, 3-1 Yatsukaho, Hakusan, Ishikawa 924-0838, Japan
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Kase Masataka
Fujitsu Microelectronics Ltd., 1500 Mizono, Tado, Kuwana, Mie 511-0192, Japan
著作論文
- Realization of Low CoSi_2/p^+-Silicon Contact Resistance with Low Junction Leakage Current and Junction Capacitance Using Laser Thermal Process
- Depth Profile of Various Bonding Configration of Nitrogen Atoms in Silicon Oxynitrides formed by Plasma Nitridation
- Photoresist Removal Using Atomic Hydrogen Generated by Hot-Wire Catalyzer and Effects on Si-Wafer Surface
- Dependence of Sheet Resistance of CoSi2 with Gate Length of 30 nm on Thickness of Titanium Nitride Capping Layer in Co-Salicide Process