Isotope effect of penetration of hydrogen and deuterium into silicon through Si/SiO2 interface
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概要
- 論文の詳細を見る
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
著者
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Fukata N
Univ. Tsukuba Tsukuba Jpn
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Murakami Kouichi
Institute Of Material Science University Of Tsukuba
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