Sustainment of Plasma Density by a Low Magnetic Field in a Dual-Frequency Capacitively Coupled Plasma
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概要
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Dual-frequency capacitively coupled plasmas (DF-CCPs) have been used to control the ion flux by the high-frequency source and the ion bombardment energy onto the electrode by the low-frequency (LF) source separately. However, an increase in the LF voltage, which extends the maximum ion energy to a higher value, causes the reduction of the bulk plasma length with a subsequent decrease of the plasma density. By using a one-dimensional particle-in-cell/Monte Carlo simulation code, the effect of the magnetic field on a DF-CCP is investigated to find whether the plasma can be sustained during the LF voltage increase. It is found that a low magnetic field can effectively maintain the plasma density and electron temperature constant with respect to the variation of the LF voltage.
- 2008-08-25
著者
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Lee Sung
Department Of Aerospace Engineering Korea Advanced Institute Of Science And Technology
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Kim Dae
Department Of Anatomy And Center For Advanced Medical Education By Bk21 Project Inha University Coll
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Lee Jae
Department Of Acupuncture & Moxibustion College Of Oriental Medicine
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Ryu Chang-mo
Department Of Physics Pohang University Of Science And Technology
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Ryu Chang-Mo
Department of Physics, Pohang University of Science and Technology, Pohang 790-784, Korea
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Kim Dae
Department of Physics, Pohang University of Science and Technology, Pohang 790-784, Korea
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Lee Sung
Department of Electronic and Electrical Engineering, Pohang University of Science and Technology, Pohang 790-784, Korea
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