Investigation of Surface Pits Originating in Dislocations in AlGaN/GaN Epitaxial Layer Grown on Si Substrate with Buffer Layer
スポンサーリンク
概要
- 論文の詳細を見る
An AlGaN/GaN heterostructural layer with a crack-free smooth surface was grown on multiple buffer layers formed on a Si(111) substrate. On the AlGaN surface, pit arrays forming a network structure were observed by atomic force microscopy (AFM). In order to clarify the origin of these pit arrays, the AlGaN/GaN layer was investigated using transmission electron microscopy (TEM). As a result, similar network structures of threading edge dislocations in the AlGaN/GaN layer were observed by plan-view TEM. It was thus confirmed that the surface pit arrays observed by AFM represent the surface termination of edge dislocations formed at the small-angle boundaries of slightly misoriented crystal domains.
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2006-04-15
著者
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Yoshida Seikoh
Yokohama R & D Laboratories The Furukawa Electric Co. Ltd.
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Matsuda Takeyoshi
Yokohama R&d Laboratories The Furukawa Electric Co. Ltd.
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Sasaki Hitoshi
Yokohama R&D Laboratories, The Furukawa Electric Co., Ltd., 2-4-3 Okano, Nishi-ku, Yokohama 220-0073, Japan
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Kato Sadahiro
Yokohama R&D Laboratories, The Furukawa Electric Co., Ltd., 2-4-3 Okano, Nishi-ku, Yokohama 220-0073, Japan
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Sato Yoshihiro
Yokohama R&D Laboratories, The Furukawa Electric Co., Ltd., 2-4-3 Okano, Nishi-ku, Yokohama 220-0073, Japan
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Iwami Masayuki
Yokohama R&D Laboratories, The Furukawa Electric Co., Ltd., 2-4-3 Okano, Nishi-ku, Yokohama 220-0073, Japan
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Iwami Masayuki
Yokohama R&D Laboratories, The Furukawa Electric Co., Ltd., 2-4-3 Okano, Nishi-ku, Yokohama 220-0073, Japan
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Sato Yoshihiro
Yokohama R&D Laboratories, The Furukawa Electric Co., Ltd., 2-4-3 Okano, Nishi-ku, Yokohama 220-0073, Japan
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Matsuda Takeyoshi
Yokohama R&D Laboratories, The Furukawa Electric Co., Ltd., 2-4-3 Okano, Nishi-ku, Yokohama 220-0073, Japan
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Yoshida Seikoh
Yokohama R&D Laboratories, The Furukawa Electric Co., Ltd., 2-4-3 Okano, Nishi-ku, Yokohama 220-0073, Japan
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Kato Sadahiro
Yokohama R&D Laboratories, The Furukawa Electric Co., Ltd., 2-4-3 Okano, Nishi-ku, Yokohama 220-0073, Japan
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