High-Speed Fabrication of Super-Resolution Near-Field Structure Read-Only Memory Master Disc using PtOx Thermal Decomposition Lithography
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概要
- 論文の詳細を見る
We propose a new lithography technique using thermal decomposition of platinum oxide (PtOx) for high-throughput master disc fabrication. The smallest pit size was evaluated to be 50 nm using a laser wavelength of 405 nm and a numerical aperture (NA) of 0.65; hence, it is one-twelfth the optical spot size. In addition, fabrication of pits with different shapes was examined, and its effects on super-resolution near-field structure (super-RENS) disc properties were studied. The readout signal characteristic evaluated on the basis of carrier-to-noise ratio (CNR) with an elliptical pit was 7 dB larger than that of the round one. The results demonstrated that this high-throughput fabrication technique is also useful for controling the pit shape for CNR improvement of super-resolution readout.
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2006-02-15
著者
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Yamakawa Yuzo
Center For Applied Near-field Optics Research (can-for) National Institute Of Advanced Industrial Sc
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NAKANO Takashi
Center for Applied Near-Field Optics Research (CAN-FOR), National Institute of Advanced Industrial S
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Kuwahara Masashi
Center For Applied Near-field Optics Research (can-for) Aist
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Shima Takayuki
Center For Applied Near-field Optics Research (can-for) Aist
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Kurihara Kazuma
Center For Applied Near-field Optics Research (can-for) National Institute Of Advanced Industrial Sc
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Shima Takayuki
Center for Applied Near-field Optics Research, CAN-FOR, National Institute of Advanced Industrial Science and Technology, AIST, Tsukuba Central 4, 1-1-1 Higashi, Tsukuba, Ibaraki 305-8562, Japan
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Tominaga Junji
Center for Applied Near Field Optics Research (CAN-FOR), National Institute of Advanced Industrial Science and Technology (AIST), Tsukuba, Ibaraki 305-8562, Japan
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Kuwahara Masashi
Center for Applied Near-field Optics Research, CAN-FOR, National Institute of Advanced Industrial Science and Technology, AIST, Tsukuba Central 4, 1-1-1 Higashi, Tsukuba, Ibaraki 305-8562, Japan
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Nakano Takashi
Center for Applied Near-field Optics Research, CAN-FOR, National Institute of Advanced Industrial Science and Technology, AIST, Tsukuba Central 4, 1-1-1 Higashi, Tsukuba, Ibaraki 305-8562, Japan
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