Demonstrative Experiment for Single-Ion Implantation Technique Using Highly Charged Ions

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概要

• 論文の詳細を見る

• When highly charged ions were implanted on a graphite surface with monitoring of secondary electrons emitted at the point of incidence, dot structures on the surface, as the imprint of ion incidence, were observed by a scanning tunneling microscope (STM). The number of events of secondary electron emission and the number of imprints coincided, which indicates that a method of detecting incident events of ion implantation of almost 100% efficiency has been established by using highly charged ions.

• Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
• 2006-02-15

著者

• OHTANI Shunsuke

  Department of Physics,Sophia University

• Tona Masahide

  Japan Science And Technology Agency

• Sakurai Makoto

  Department Of Applied Chemistry College Of Engineering Chubu University

• Nakamura Nobuyuki

  Institute for Laser Science, University of Electro-Communications, Chofu, Tokyo 182-8585, Japan

• Takahashi Satoshi

  Institute for Laser Science, University of Electro-Communications, Chofu, Tokyo 182-8585, Japan

• Shibata Masa-aki

  Institute for Laser Science, University of Electro-Communications, Chofu, Tokyo 182-8585, Japan

• Yamada Chikashi

  Department of Applied Physics and Chemistry, University of Electro-Communications, Chofu, Tokyo 182-8585, Japan

• Yoshiyasu Nobuo

  Department of Applied Physics and Chemistry, University of Electro-Communications, Chofu, Tokyo 182-8585, Japan

• Shimizu Hiroshi

  ULVAC PHI Inc., Chigasaki, Kanagawa 253-0084, Japan

• Nagata Kazuo

  Institute for Laser Science, University of Electro-Communications, Chofu, Tokyo 182-8585, Japan

• Tona Masahide

  Japan Science and Technology Agency, Chofu, Tokyo 182-8585, Japan

• Ohtani Shunsuke

  Department of Applied Physics and Chemistry, University of Electro-Communications, Chofu, Tokyo 182-8585, Japan

• NAKAMURA Nobuyuki

  Institute for Laser Science, The University of Electro-Communications

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