Electrical Resistivity of Carbon Micro Coil Measured by a Multi-Probe Unit Installed in a Scanning Electron Microscope
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概要
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We have done four-terminal resistance measurement of a carbon micro-coil (CMC) using a multi-probe unit installed in a scanning electron microscope (SEM). With minimizing a charging effect of specimens for SEM observation, we have kept sufficient electrical insulation between the sample and the substrate. CMC shows an ohmic conduction and has a resistivity value of about $1.5\times 10^{-4}$ $\Omega$ m at room temperature. This resistivity measurement method will be applicable to other micro-scale samples.
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2005-09-15
著者
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HIHARA Takehiko
Department of Materials Science and Engineering, Graduate School of Engineering, Nagoya Institute of
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Sumiyama Kenji
Department Of Material Science And Technology Kyoto University
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Motojima Seiji
Department Of Applied Chemistry Faculty Of Engineering Gifu University
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Hihara Takehiko
Department of Materials Science and Engineering, Nagoya Institute of Technology, Gokiso-tyo, Showa-ku, Nagoya 466-8555, Japan
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Kajihara Yukio
Department of Materials Science and Engineering, Nagoya Institute of Technology, Gokiso-tyo, Showa-ku, Nagoya 466-8555, Japan
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Motojima Seiji
Department of Applied Chemistry, Faculty of Engineering, Gifu University, 1-1 Yanagido, Gifu 501-1193, Japan
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SUMIYAMA Kenji
Department of Frontier Materials Graduate School of Engineering, Nagoya Institute of Technology
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HIHARA Takehiko
Department of Frontier Materials Graduate School of Engineering, Nagoya Institute of Technology
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