Single crystal growth of zirconium nitride by modified filament-method.
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概要
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Single crystals of zirconium nitride (ZrN) have been grown by the modified filament-method from a gas mixture of ZrCl<SUB>4</SUB>, N<SUB>2</SUB>, H<SUB>2</SUB>, and Ar. The cubic crystals grew at 2000–2200 °C with a gas flow ratio 2N<SUB>2</SUB>/ZrCl<SUB>4</SUB> of 2–6, and evaporation of ZrN took place above 2400 °C. Linear growth rates along the <100> direction have been measured in terms of sequential micrographs, and attained a maximum of 60–75 μm/min at 2100–2200 °C. The atomic ratio N/Zr of grown crystals increased with an increase of the flow ratio 2N<SUB>2</SUB>/ZrCl<SUB>4</SUB>, and reached a constant of 0.93 above the flow ratio of 3.
- 公益社団法人 日本化学会の論文
著者
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Motojima Seiji
Department Of Applied Chemistry Faculty Of Engineering Gifu University
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Watanabe Kunio
Department Of Environmental Chemistry And Engineering Tokyo Institute Of Technology
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Takahashi Yasutaka
Department Of Applied Chemistry Faculty Of Engineering Gifu University
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Sugiyama Kohzo
Department of Applied Chemistry, Faculty of Engineering, Nagoya University
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