Analysis of the Change in the Carrier Concentration of SnO_2 Thin Film Gas Sensor

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概要

• 論文の詳細を見る

• Electrical properties and the number of unpaired electrons localized in oxygen vacancies of SnO_2 thin films were quantitatively analyzed using the van der Pauw method and ESR spectra, respectively, in order to clarify the source of carrier electrons induced on gas sensing. The concentration of carriers generated was related to the amount of unpaired electrons localized in oxygen vacancies which were produced under the flammable gasatmosphere. No adsorbed oxygen was detected by ESR. From these results it is concluded that most of the carrier electrons were supplied not from adsorbed oxygen on SnO_2 surface but from oxygen vacancies of the SnO_2 surface layer.

• 社団法人応用物理学会の論文
• 1994-12-15

著者

• Takahashi Yoshihiro

  Department Of Applied Physics School Of Engineering Tohoku University

• OHYA Yutaka

  Department of Applied Chemistry, Faculty of Engineering, Gifu University

• TAKAHASHI Yasutaka

  Department of Applied Chemistry, Faculty of Engineering, Gifu University

• Ohya Y

  Gifu Univ. Gifu‐shi

• Ohya Yutaka

  Department Of Chemistry Faculty Of Engineering Gifu University

• Ohya Yutaka

  Department Of Chemisrty Faculty Of Engineering Gifu University

• Ohya Yutaka

  Department Of Applied Chemistry Faculty Of Engineering Gifu University

• Takahashi Yukihiro

  Central Research Laboratory Matsushita Electric Industrial Co. Ltd.

• Takahashi Yoshinori

  Division Of Electrical Electronic And Information Engineering Osaka University

• Takahashi Y

  National Inst. Animal Health Ibaraki Jpn

• KANAMORI Masaaki

  First Research Department, Research & Development Division, NOK CORPORATION

• SUZUKI Kiyohiro

  First Research Department, Research & Development Division, NOK CORPORATION

• Kanamori M

  First Research Dept. Research & Development Div. Nok Corporation

• Takahashi Y

  Department Of Molecular & Materials Sciences Kyushu University

• Suzuki Kiyohiro

  First Research Department Research & Development Division Nok Corporation

• Takahashi Yasutaka

  Department Of Applied Chemistry Faculty Of Engineering Gifu University

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