Temperature Dependence of Porogen Desorption from Low-$k$ Porous Silica Films Incorporated with Ethylene Groups
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概要
- 論文の詳細を見る
The temperature dependence of porogen desorption from low-$k$ silica films incorporated with ethylene groups was investigated. Total-reflection X-ray measurement indicated that porogen desorption characteristics strongly depended on temperature and time. The time required for film annealing at 400°C was 3 h, while that required for film annealing at 375°C was 8 h. These results were confirmed by temperature desorbing spectra measurement. The film vacuum annealed at 375°C for 8 h did not show that the peaks came from porogen.
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2005-04-15
著者
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Uchida Yasutaka
Department Of Electrical And Electronic Engineering Tokyo Institute Of Technology
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Ito Yoshito
Department of Media Science, Faculty of Science and Technology, Teikyo University of Science and Technology, 2525 Yatsusawa, Uenohara-machi, Kitatsuru-gun, Yamanashi 409-0193, Japan
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Ishida Koichi
Department of Media Science, Faculty of Science and Technology, Teikyo University of Science and Technology, 2525 Yatsusawa, Uenohara-machi, Kitatsuru-gun, Yamanashi 409-0193, Japan
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Maruyama Yoshiyuki
Department of Media Science, Faculty of Science and Technology, Teikyo University of Science and Technology, 2525 Yatsusawa, Uenohara-machi, Kitatsuru-gun, Yamanashi 409-0193, Japan
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Katoh Tomohiro
Department of Media Science, Faculty of Science and Technology, Teikyo University of Science and Technology, 2525 Yatsusawa, Uenohara-machi, Kitatsuru-gun, Yamanashi 409-0193, Japan
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ISHIDA Koichi
Department of Food Science and Technology, Faculty of Agriculture, Nagoya University
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Katoh Tomohiro
Department of Endodontics, Nihon University School of Dentistry at Matsudo
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Uchida Yasutaka
Department of Media Science, Faculty of Science and Technology, Teikyo University of Science and Technology, 2525 Yatsusawa, Uenohara-machi, Kitatsuru-gun, Yamanashi 409-0193, Japan
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