Preparation of $\beta$-FeSi2 Thin Films on Silica Glass Substrates by Vacuum Evaporation Using FeSi2 Powder as Evaporation Material
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概要
- 論文の詳細を見る
$\beta$-FeSi2 films have been prepared on silica glass substrates by vacuum evaporation using FeSi2 powder as an evaporation material. Polycrystalline films were obtained by annealing the as-deposited films above 800°C. X-ray diffraction (XRD) showed that the films composed of only the $\beta$-FeSi2 phase were formed by the evaporation using the virgin FeSi2 source. On the other hand, the $\varepsilon$-FeSi phase in addition to the $\beta$-FeSi2 phase was contained in the films prepared by using the source residue in the former evaporation. XRD measurements also showed that the residue of the FeSi2 source contained much $\varepsilon$-FeSi phase. It was found that the virgin FeSi2 source is indispensable in preparing $\beta$-FeSi2 films reproducibly by vacuum evaporation using the FeSi2 source.
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2005-10-15
著者
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Kokubun Yoshihiro
Department Of Electronic Engineering Faculty Of Engineering Tohoku University
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Ehara Takashi
Department Of 1 St Pathology Shinshu University
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Nakagomi Shinji
Department Of Electronic Materials School Of Science And Engineering Ishinomaki Senshu University
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Saito Koichi
Department Of Agricultural Chemistry Faculty Of Agriculture Kyoto Prefectural University
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Saito Koichi
Department of Information Technology and Electronics, Faculty of Science and Engineering, Ishinomaki Senshu University, 1 Shinmito Minamisaki, Ishinomaki, Miyagi 986-8580, Japan
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Kokubun Yoshihiro
Department of Information Technology and Electronics, Faculty of Science and Engineering, Ishinomaki Senshu University, 1 Shinmito Minamisaki, Ishinomaki, Miyagi 986-8580, Japan
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Saito Kaname
Department of Information Technology and Electronics, Faculty of Science and Engineering, Ishinomaki Senshu University, 1 Shinmito Minamisaki, Ishinomaki, Miyagi 986-8580, Japan
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Ehara Takashi
Department of Information Technology and Electronics, Faculty of Science and Engineering, Ishinomaki Senshu University, 1 Shinmito Minamisaki, Ishinomaki, Miyagi 986-8580, Japan
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Nakagomi Shinji
Department of Information Technology and Electronics, Faculty of Science and Engineering, Ishinomaki Senshu University, 1 Shinmito Minamisaki, Ishinomaki, Miyagi 986-8580, Japan
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