Preparation of ZnO Thin Films on Sapphire Substrates by Sol-Gel Method
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概要
- 論文の詳細を見る
ZnO films have been prepared on (0001) sapphire substrates by the sol-gel method from a 2-methoxyethanol solution of zinc acetate dihydrate stabilized by monoethanolamine. The structural properties of the films have been characterized by X-ray diffraction, compared with the films on silica glass substrates. The crystallinity was enhanced in the ZnO films on sapphire substrates by increasing heat-treatment temperature, whereas it was degraded in the films on silica glass substrates at heat-treatment temperatures above 700°C. Completely (0001)-oriented ZnO films were successfully prepared by heat-treatment at temperatures above 800°C on (0001) sapphire substrates annealed at 1000°C in air. The $c$-axis lattice constants of the ZnO films on sapphire substrates were larger than those of bulk ZnO and ZnO films on silica glass substrates.
- Japan Society of Applied Physicsの論文
- 2003-08-01
著者
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Kokubun Yoshihiro
Department Of Electronic Engineering Faculty Of Engineering Tohoku University
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Kokubun Yoshihiro
Department Of Information Technology And Electronics; School Of Science And Engineering Ishinomaki S
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Kimura Hiroko
Department Of Forensic Medicine Juntendo University School Of Medicine
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Kimura Hiroko
Department Of Information Technology And Electronics; School Of Science And Engineering Ishinomaki S
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Nakagomi Shinji
Department of Information Technology and Electronics, School of Science and Engineering, Ishinomaki
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Nakagomi Shinji
Department Of Electronic Materials School Of Science And Engineering Ishinomaki Senshu University
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Nakagomi Shinji
Department Of Information Technology And Electronics; School Of Science And Engineering Ishinomaki S
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Kimura Hiroko
Department of Chemistry, Faculty of Science, Ochanomizu University
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