Effect of Driving Frequency on the Electron Energy Probability Function of Capacitively Coupled Argon Plasmas Comparison between Simulation and Experiment
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概要
- 論文の詳細を見る
The effect of driving frequency in the range of 13–50 MHz on the electron energy probability function (EEPF) in capacitively coupled discharges is studied using particle-in-cell/Monte Carlo(PIC/MC) method. The EEPFs obtained from the simulation generally agree well with the measured data of Abdel-Fattah and Sugai. Detailed comparison shows, however, that the transition from the Druyvesteyn distribution to the bi-Maxiwellian type with increasing driving frequency is not as clear in the simulation as in the experiment.
- INSTITUTE OF PURE AND APPLIED PHYSICSの論文
- 2004-06-15
著者
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Takekida Hideto
Institute Of Fluid Science Tohoku University
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Nanbu Kenichi
Institute For Fluid Science Tohoku University
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Nanbu Kenichi
Institute of Fluid Science, Tohoku University, Sendai 980-8577, Japan
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