Self-Consistent Particle Simulation of Radio Frequency CF_4 Discharge : Effect of Gas Pressure
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概要
- 論文の詳細を見る
The dependence of structure of rf CF_4 discharge on gas pressure is investigated using the Particle-in-Cell/Monte Carlo method. When the pressure is decreased, the discharge suddenly changes from electronegative to electropositive. For instance, the electron density increases in excess of negative ion density, and double layer and oscillation of bulk electric held disappear. Therefore, joule heating in the bulk disappears, resulting in an abnormally low electron temperature. The high ionization rate in the bulk under low electron temperature can be explained based on the electron energy probability function.
- 社団法人応用物理学会の論文
- 2000-05-15
著者
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Nanbu Kenichi
Institute Of Fluid Science Tohoku University
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Denpoh Kazuki
Central Research Laboratory Tokyo Electron Ltd.
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Nanbu Kenichi
Institute For Fluid Science Tohoku University
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