Detailed Structure of the Afterglow of Radio-Frequency Chlorine Discharge
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概要
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The potential, ion density, electron density, and the rates of excitation, attachment, and ionization in the afterglow of radio-frequency chlorine discharge are examined using the particle-in-cell/Monte Carlo method. The gas pressure is 50 mTorr and the amplitude of rf voltage is 250 V before the power is turned off. The electron loss mechanism changes near time t=3 μs. For t<3 μs, the loss is caused by the escape of fast electrons to the electrodes; for t>3 μs, the loss is caused by dissociative attachment of slow electrons.
- 社団法人応用物理学会の論文
- 1999-08-15
著者
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Nanbu Kenichi
Institute Of Fluid Science Tohoku University
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Kageyama Junichi
Institute Of Fluid Science Tohoku University
-
Nakagome Takeo
Institute of Fluid Science, Tohoku University
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Nakagome Takeo
Institute Of Fluid Science Tohoku University
-
Nanbu Kenichi
Institute For Fluid Science Tohoku University
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