Analytical Solution of Axisymmetrical Poisson Equation for the Electric Field with Thin Sheaths(Gases, Plasmas and Electric Discharges)
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概要
- 論文の詳細を見る
In materials processing plasmas, many plasma reactors have the shape of a finite cylinder. By the use of the variational method and the boundary-layer theory, here is proposed an analytical solution method of axisymmetrical Poisson equation for the electric field with thin sheaths. The method is extremely faster than the various methods based on the finite difference equation. The present method makes the numerical simulation of materials processing plasmas much more easier.
- 社団法人日本物理学会の論文
- 2005-01-15
著者
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NANBU Kenichi
Institute of Fluid Science, Tohoku University
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Tong Lizhu
Institute Of Fluid Science Tohoku University
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Nanbu Kenichi
Institute Of Fluid Science Tohoku University
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Nanbu Kenichi
Institute For Fluid Science Tohoku University
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