Model for Collisions of SF_6^-, SF_5^-, or F^- Ions with SF_6 Molecules(Atomic and Molecular Physics)
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概要
- 論文の詳細を見る
Using the measured swarm parameters of SF_6^-, SF_5^-, and F^- ions in SF_6 gas, an ion-molecule collision model based on Nanbu and Kitatani's theory [J. Phys. D 28 (1995) 324] is constructed. The model works well for a wide range of reduced electric field E/N of 5-1000Td (1Td=10^<-21> Vm^2). The model is usable for the particle modeling of SF_6 discharge.
- 社団法人日本物理学会の論文
- 2005-05-15
著者
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TONG Lizhu
Institute of Fluid Science, Tohoku University
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NANBU Kenichi
Institute of Fluid Science, Tohoku University
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Tong Lizhu
Institute Of Fluid Science Tohoku University
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Nanbu Kenichi
Institute For Fluid Science Tohoku University
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