Electron Energy Distributions in Inductively Coupled Plasma : Comparison of Chlorine Discharge with Argon Discharge
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概要
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The characteristics of the electron energy distribution functions (EEDFs) in inductively-coupled discharges of chlorine and argon gases are studied numerically. The EEDFs in atomic gases such as Ar and Cl show the three-temperature distribution with depletion in the high-energy region and enhancement in the low-energy region. By contrast, the EEDF for Cl_2 shows the bi-Maxwellian distribution close to the Maxwellian one. The reason for this difference is explained by the difference of electronic inelastic collision cross sections between atomic and molecular gases. The EEDFs obtained in the present simulation agree with the earlier experimental results qualitatively.
- 社団法人応用物理学会の論文
- 2002-10-15
著者
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NANBU Kenichi
Institute of Fluid Science, Tohoku University
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Yonemura Shigeru
Institute Of Fluid Science Tohoku University
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Nanbu Kenichi
Institute Of Fluid Science Tohoku University
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SAKAI Kazuma
Institute of Fluid Science, Tohoku University
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Sakai Kazuma
Institute Of Fluid Science Tohoku University
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Nanbu Kenichi
Institute For Fluid Science Tohoku University
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