Nanbu Kenichi | Institute of Fluid Science, Tohoku University, Sendai 980-8577, Japan

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概要

• Nanbu Kenichiの詳細を見る
• 同名の論文著者
• Institute of Fluid Science, Tohoku University, Sendai 980-8577, Japanの論文著者

関連著者

• Takekida Hideto

  Institute Of Fluid Science Tohoku University

• Nanbu Kenichi

  Institute For Fluid Science Tohoku University

• Nanbu Kenichi

  Institute of Fluid Science, Tohoku University, Sendai 980-8577, Japan

著作論文

• Effect of Driving Frequency on the Electron Energy Probability Function of Capacitively Coupled Argon Plasmas Comparison between Simulation and Experiment
• Self-Consistent Particle Modeling of Inductively Coupled CF4 Plasmas: Effect of Wafer Biasing

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