Electron Motion Three-Dimensional Confinement for Microelectronic Vacuum Gauges with Field Emitters

概要

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Novel microelectronics vacuum gauges using field emitters are proposed and the three-dimensional (3D) confinement of electron motion is numerically analyzed. For the case of magnetron and inverted-magnetron structures, the two-dimensional (2D) confinement of electron motion takes place when the electrons move subject to crossed electric $\mbi{E}$ and magnetic $\mbi{B}$ fields. The radial electric field is applied between two cylindrical surfaces coaxial around the $X$ axis, which is also the direction of the applied magnetic field $\mbi{B}$. A similar structure named “orbitip” is used for electron 2D confinement without magnetic fields for special conditions concerning the electron launching. For all above-mentioned devices, designs involving a region of minimal potential energy for the electron along the axial $X$ direction may ensure the electron motion confinement along this direction. Such configurations are obtained if the inner cylindrical electrode (or the outer one, or both) has a variable radius and also an external planar electrode is used.
2001-04-15