Electron-Beam Focusing and Deflection Properties for Misaligned Dual Gate Field Emitters

概要

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Field emitters are used as distributed electron sources in applications such as field emission displays (FEDs) and electron guns. The focusing and deflection of an electron beam may be achieved using dual gate structures. The fabrication process for such emitters involves self-aligning steps with certain tolerances and also non-self-aligning steps. In this article, the effects of emitter structure misalignments on the device focusing properties are studied. The simulation results have been obtained using the Simion 3D 7.0 software package. The electron trajectories are very sensitive to the relative position of the field emitter within the structure. An optimal position of the focusing gate has been shown to exist even when this electrode is misaligned with respect to the emitter.
2001-06-15