Time Evolution of Nucleation and Vertical Growth of Carbon Nanotubes during Plasma-Enhanced Chemical Vapor Deposition
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概要
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We have investigated the time evolution during nanotube growth and proposed the growth mechanism in order to understand the effects of plasma properties on nanotube formation and controlled growth in the case of plasma-enhanced chemical vapor deposition. The nucleation process of multi-walled carbon nanotubes (MWNTs) firstly takes place through catalyst tip formation. MWNTs grow with a wide diameter distribution at the initial growth stage and finally attain similar diameters as growth proceeds. In addition, ion flux and bombardment energy need to be optimized during the nanotube growth for vertical alignment and a highly crystallized structure.
- 2003-11-01
著者
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Jeong Goo-hwan
Department Of Electronic Engineering Tohoku University
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Tohji Kazuyuki
Department Of Chemistry Faculty Of Science Gakushuin University
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Kato Toshiaki
Department Of Applied Chemistry School Of Engineering Tokai University
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Satake Nobuhiko
Department Of Electronic Engineering Tohoku University
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Hatakeyama Rikizo
Department Of Electronic Engineering Tohoku University
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Hirata Takamichi
Department Of Electronic Engineering Tohoku University
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Jeong Goo-Hwan
Department of Electronic Engineering, Tohoku University, Aoba-ku, Sendai 980-8579, Japan
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Hirata Takamichi
Department of Biomedical Engineering, Musashi Institute of Technology, Tokyo 158-8557, Japan
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Hirata Takamichi
Department of Electronic Engineering, Tohoku University, Aoba-ku, Sendai 980-8579, Japan
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Satake Nobuhiko
Department of Electronic Engineering, Tohoku University, Aoba-ku, Sendai 980-8579, Japan
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Kato Toshiaki
Department of Electronic Engineering, Tohoku University, Aoba-ku, Sendai 980-8579, Japan
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