Effects of Ion Energy Control on Production of Nitrogen–C60 Compounds by Ion Implantation
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概要
- 論文の詳細を見る
Nitrogen–C60 compounds such as azafullerene (C59N) and nitrogen-atom-encapsulated fullerene (N@C60) are produced by implanting nitrogen ions into C60 thin films on a substrate immersed in an electron cyclotron resonance plasma under a mirror magnetic field. Each compound is found to be synthesized, depending on the ion energy provided by the potential difference between the substrate and the plasma. The optimum energy for C59N synthesis is approximately 40–50 eV, and the amount of C59N decreases in an ion energy range larger than 50 eV. In contrast, an ion energy larger than 20 eV is required for N@C60 synthesis.
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2006-10-30
著者
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SATO Genta
Japan Science and Technology Agency
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YOKOO Kuniyoshi
Ideal Star Inc.
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ONO Shoichi
Ideal Star Inc.
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OMOTE Kenji
Ideal Star Inc.
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KASAMA Yasuhiko
Ideal Star Inc.
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Abe Shigeyuki
Department Of Electronic Engineering Tohoku University
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Hatakeyama Rikizo
Department Of Electronic Engineering Tohoku University
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Kaneko Toshiro
Department Of Electronic Engineering Tohoku University
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Hirata Takamichi
Department Of Electronic Engineering Tohoku University
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Yokoo Kuniyoshi
Ideal Star Inc., 6-6-3 Minamiyoshinari, Aoba-ku, Sendai 989-3204, Japan
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Hirata Takamichi
Department of Biomedical Engineering, Musashi Institute of Technology, Tokyo 158-8557, Japan
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Kasama Yasuhiko
Ideal Star Corporation, Minami-Yoshinari 6-6-3, Aoba-ku, Sendai 989-3204, Japan
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Kasama Yasuhiko
Ideal Star Inc., 6-6-3 Minamiyoshinari, Aoba-ku, Sendai 989-3204, Japan
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Abe Shigeyuki
Department of Electronic Engineering, Tohoku University, 6-6-05 Aoba, Aramaki, Aoba-ku, Sendai 980-8579, Japan
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Sato Genta
Japan Science and Technology Agency, Innovation Plaza Miyagi, 6-6-5 Minamiyoshinari, Aoba-ku, Sendai 989-3204, Japan
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Omote Kenji
Ideal Star Corporation, Minami-Yoshinari 6-6-3, Aoba-ku, Sendai 989-3204, Japan
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Omote Kenji
Ideal Star Inc., 6-6-3 Minamiyoshinari, Aoba-ku, Sendai 989-3204, Japan
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