Growth of Vertically Aligned Carbon Nanotube Bundles using Atmospheric-Pressure Microplasma

概要

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Vertically aligned bundles of multiwalled carbon nanotubes (MWNTs) were grown on the tip of a $\phi 0.5$ mm nickel wire using an atmospheric-pressure microplasma (APμP) generated by a RF-powered pipe electrode. A CH4 and H2 gas mixture was used for the source gas, and the nickel wire used as the substrate was negatively biased to heat it by ion bombardment. At a ratio of $\text{CH$_{4}$}:\text{H$_{2}$}=1:35$, a RF power of 6 W, a DC bias voltage of $-100$ V and a growth time of 2 min, the tip of the nickel wire was covered by bamboo-like MWNT bundles, whose diameter and length were about 600 nm and 2–3 μm, respectively. Each bundle consisted of about 1500 tubes with diameters of 10–25 nm. The growth temperature of the MWNT bundles was approximately 500 °C.
Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
2006-12-15