Alkali-Halogen Plasma Generation Using Alkali Salt
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概要
- 論文の詳細を見る
An alkali-halogen plasma can be used as an ion source in plasma applications. The plasma is generated by a dc magnetron discharge using thermal cathodes under a uniform magnetic field. Alkali-salt vapor is dissociated and ionized by $E\times B$-drift electron impact, and alkali positive ions and halogen negative ions are produced. A magnetic-filter region is located at an exit of the discharge region and electrons are removed from the plasma. Pronounced thermionic emission and a strong $B$ field are optimized, resulting in the generation of alkali-halogen plasma with an ion density of $3\times 10^{8}$ cm-3 at $B=0.2$ T.
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2006-10-30
著者
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Hatakeyama Rikizo
Department Of Electronic Engineering Tohoku University
-
Oohara Wataru
Department Of Electronic Engineering Tohoku University
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Nakahata Masahiro
Department of Electronic Engineering, Tohoku University, Sendai 980-8579, Japan
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OOHARA Wataru
Department of Electronic Device Engineering, Yamaguchi University, Ube 755-8611, Japan
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