Capacitively Coupled Microplasma Source on a Chip at Atmospheric Pressure : Nuclear Science, Plasmas, and Electric Discharges
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概要
- 論文の詳細を見る
A small-scale and low-power 13.56MHz capacitively coupled plasma is generated in a capillary, whose cross section is 65-500×500-5000 μm, on a quartz chip of 20×20mm at atmospheric pressure. The capillary is sandwiched between parallel-plate electrodes which are externally located on a chip. A π-type matching network is miniaturized and appropriately designed to satisfy the resonance condition with the excitation frequency, so that helium plasma ignites at an incident power of1-3W. The atomic excitation temperature measured from the intensity distribution of He I lines is about 1900K at atmospheric pressure. This result suggests that a low-electronic-temperature plasma is obtained.
- 社団法人応用物理学会の論文
- 2001-04-01
著者
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Horiike Yasuhiro
Department Of Materials Science The University Of Tokyo
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Horiike Yasuhiro
Department Of Electrical & Electronics Engineering Tokyo University
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Horiike Yasuhiro
Department Of Electrical Engineering Hiroshima University
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Horiike Yasuhiro
Department Of Materials Engineering The University Of Tokyo
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Horiike Yasuhiro
Department Of Electrical And Electronics Engineering Toyo University:department Of Materials Science
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Horiike Yasuhiro
Toshiba Research And Development Center Integrated Circuit Laboratory
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Horiike Yasuhiro
Toyo University
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Yoshiki Hiroyuki
Tsuruoka National College Of Technology
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Horiike Yasuhiro
Department Of Electrical & Electronics Engineering Toyo University
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