Characterization of solid surfaces by means of combined electron spectroscopy (XPS-SEM-microAES).:XPS-SEM-MicroAES
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概要
- 論文の詳細を見る
A new combined system composed of XPS, SEM and microAES was realized for non-destructive surface characterization. A position sensitive detector system was utilized and a marked improvement of measurement efficiency was obtained. This combined system proved to be very useful for surface chemical state analysis, quantitative analysis and trace analysis.
- 日本学士院の論文
著者
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NIHEI Yoshimasa
Institute of Industrial Science, University of Tokyo
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Nihei Yoshimasa
Institute Of Industrial Science The University Of Tokyo
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Kamada Hitoshi
Department Of Chemical Industry Faculty Of Engineering University Of Tokyo
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Kudo Masahiro
Department Of Applied Physics Faculty Of Engineereing Seikei University
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KUDO Masahiro
Department of Industrial Chemistry, Faculty of Engineering, University of Tokyo
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