AES-IMA複合装置による核融合第1壁材料としてのシリコンカーバイドの表面特性評価

概要

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The interaction of energetic ions such as H+, D+, He+ and Ar+ against the surface of silicon carbide which will be a promising material for the first wall in a controlled thermonuclear reactor (CTR) has been studied by means of an AES-IMA combined system (AID). The erosion yields of silicon carbide with these ions were measured by a volumetric method in dependence on incident ion energy and temperature of the target. A maximum erosion yield was observd at the incident energy around 8 keV for H+ ions and the yield decreased gradually as temperature of the target increased up to 1000°C, while small increase was observed by He+ ions. This difference could be attributed to chemical sputtering to form hydrocarbon and silicon hydride during hydrogen ion bombardment, since the amount of secondary ions formed through the chemical sputtering decreased as heating the target.
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