DC-DCコンバータLSIパッケージ内蔵用Znフェライト厚膜プレーナパワーインダクタの試作

概要

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In order to realize the “POL (Point of Load)” dc-dc converter for LSIs, a Zn-ferrite thick film planar power inductor embedded in LSI package has been fabricated and evaluated in this study. 10 μm thick spin-sprayed Zn ferrite film with a high saturation magnetization of 0.57 T was introduced to the magnetic core for planer power inductor consisting of a 20 μm thick, 650 μm square, 2-turn inner copper spiral coil sandwiched by top and bottom magnetic core. Zn ferrite film had a natural resonance frequency of 500 MHz and a static relative permeability of 80. The planar power inductor with a footprint of 850×850 μm exhibited a 10 nH inductance and a quality factor of 20 at 100 MHz. The degradation of inductance owing to the superimposed dc current of 2A was 17%. The planar power inductor will be applied to low-voltage converter with hundreds megahertz switching operation in the future.