Optimization of Extreme Ultraviolet Emission from Laser-Produced Tin Plasmas Based on Radiation Hydrodynamics Simulations
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概要
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We investigated the plasma conditions for obtaining highly efficient extreme ultraviolet light from laserproduced tin plasmas for lithography of next generation semiconductors. Based on accurate atomic data tables calculated using the detailed configuration accounting code, we conducted 1-D radiation hydrodynamic simulations to calculate the dynamics of tin plasma and its emission of extreme ultraviolet light. We included the photo-excitation effect in the radiation transport. Our simulation reproduced experimental observations successfully. Using our verified code, we found that a CO<SUB>2</SUB> laser can be useful in obtaining higher conversion efficiencies up to 4%.
- 社団法人 プラズマ・核融合学会の論文
著者
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Nishihara Katsunobu
Institue Of Laser Engineering Osaka University
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Sasaki Akira
Advanced Photon Research Center Kansai Research Establishment Japan Atomic Energy Research Institute
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SUNAHARA Atsushi
Institute for Laser Technology
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SUNAHARA Atsushi
Institute for Laser Technology, 2-6 Yamadaoka Suita Osaka 565-0871, Japan
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SASAKI Akira
Advanced Photon Research Institute of Japan Atomic Energy Agency, 8-1 Umemidai Kizugawa Kyoto 619-0215, Japan
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NISHIHARA Katsunobu
Institute of Laser Engineering, Osaka University, 2-6 Yamadaoka Suita Osaka 565-0871, Japan
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