Characteristics of Extreme Ultraviolet Radiation Conversion Efficiency of Xenon Plasma
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概要
- 論文の詳細を見る
The characteristics of the plasma conversion efficiency of $4d^{7}5p\rightarrow 4d^{8}$ transitions of xenon have been theoretically investigated using the quasi-steady-state collisional radiative model. Results indicate that a large conversion efficiency is achieved for electron densities between $10^{18}$ and $10^{19}$ cm-3. In relation to rapid plasma heating in capillary discharges, the influence of nonequilibrium ionization on the conversion efficiency has been investigated. The study clearly shows that the ionization state distribution is a function of the history of plasma evolution, and a rapid heating process under appropriate plasma conditions allows us to obtain higher conversion efficiency values compared with the steady-state calculations.
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2004-12-15
著者
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Hotta Eiki
Department Of Electrical And Electronic Engineering Faculty Of Engineering Tokyo Institute Of Techno
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Nakajima Mitsuo
Department Of Energy Sciences Interdisciplinary Graduate School Of Science And Engineering Tokyo Ins
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Horioka Kazuhiko
Department Of Energy Sciences Interdisciplinary Graduate School At Suzukakedai Tokyo Institute Of Te
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Masnavi Majid
Department Of Energy Sciences Tokyo Institute Of Technology
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Sasaki Akira
Advanced Photon Research Center Kansai Research Establishment Japan Atomic Energy Research Institute
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Horioka Kazuhiko
Department of Energy Sciences, Interdisciplinary Graduate School of Science and Engineering, Tokyo Institute of Technology, 4259 Nagatsuta, Midori-ku,Yokohama 226-8502, Japan
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Nakajima Mitsuo
Department of Energy Sciences, Interdisciplinary Graduate School of Science and Engineering, Tokyo Institute of Technology, 4259 Nagatsuta, Midori-ku,Yokohama 226-8502, Japan
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Masnavi Majid
Department of Energy Sciences, Interdisciplinary Graduate School of Science and Engineering, Tokyo Institute of Technology, 4259 Nagatsuta, Midori-ku,Yokohama 226-8502, Japan
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