Characteristics of Xenon Capillary Z-Pinch Extreme Ultraviolet Lithography Source Driven by Different $dI/dt$ Discharge Current Pulses
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概要
- 論文の詳細を見る
Next-generation lithography will require an extreme-ultraviolet (EUV) light source that ensures high radiation intensities at a wavelength of around 13.5 nm. The characteristics of pinch dynamics and emission in this spectral range were studied experimentally for xenon capillary Z-pinch plasma driven by different $dI/dt$ discharge current pulses. The pinch dynamics of the capillary Z-pinch plasma were examined by employing a high-speed camera, and the spectral emission from plasma was inspected using an EUV photodiode, a mini calorimeter and spectrometers. Our results confirm that high-$dI/dt$ discharge current has better performance in comparison with the low one in terms of plasma dynamics, EUV power output and debris generation.
- 2005-12-15
著者
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Watanabe Masato
Department Of Energy Sciences Tokyo Institute Of Technology
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SONG Inho
Department of Energy Sciences, Tokyo Institute of Technology
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Kawamura Toru
Department Of Hepato-biliary-pancreatic Surgery Tokyo Medical And Dental University
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Hotta Eiki
Department Of Electrical And Electronic Engineering Faculty Of Engineering Tokyo Institute Of Techno
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Horioka Kazuhiko
Department Of Energy Sciences Interdisciplinary Graduate School At Suzukakedai Tokyo Institute Of Te
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Homma Yusuke
Department Of Energy Sciences Tokyo Institute Of Technology
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Yasuoka Koichi
Department Of Electrical And Electronic Engineering Faculty Of Engineering Tokyo Institute Of Techno
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Iwata Kazuhiro
Department Of Applied Physics Faculty Of Engineering Nagoya University
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Mohanty Smruti
Centre Of Plasma Physics
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Okino Akitoshi
Department of Energy Sciences, Tokyo Institute of Technology, Yokohama 226-8502, Japan
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Okino Akitoshi
Department of Electrical and Electronic Engineering, Tokyo Institute of Technology, O-okayama, Meguro-ku, Tokyo 152-8552, Japan
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Watanabe Masato
Department of Energy Sciences, Tokyo Institute of Technology, Yokohama 226-8502, Japan
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Kawamura Toru
Department of Energy Sciences, Tokyo Institute of Technology, Yokohama 226-8502, Japan
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Iwata Kazuhiro
Department of Energy Sciences, Tokyo Institute of Technology, Yokohama 226-8502, Japan
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Yasuoka Koichi
Department of Electrical and Electronic Engineering, Tokyo Institute of Technology, Tokyo 152-8552, Japan
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Song Inho
Department of Energy Sciences, Tokyo Institute of Technology, Yokohama 226-8502, Japan
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Homma Yusuke
Department of Energy Sciences, Tokyo Institute of Technology, Yokohama 226-8502, Japan
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