Characteristics of Xenon Capillary Z-Pinch Extreme Ultraviolet Lithography Source Driven by Different dI/dt Discharge Current Pulses
スポンサーリンク
概要
- 論文の詳細を見る
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2005-12-30
著者
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WATANABE Masato
Department of Energy Sciences, Tokyo Institute of Technology
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OKINO Akitoshi
Department of Energy Sciences, Tokyo Institute of Technology
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HOTTA Eiki
Department of Energy Sciences, Tokyo Institute of Technology
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KAWAMURA Toru
Department of Hepatobiliary Surgery, Graduate School, Tokyo Medical and Dental University
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Watanabe M
Dep. Of Energy Sciences Tokyo Inst. Of Technol.
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SONG Inho
ITER-KO PPSS Team
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SONG Inho
Department of Energy Sciences, Tokyo Institute of Technology
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IWATA Kazuhiro
Department of Energy Sciences, Tokyo Institute of Technology
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HOMMA Yusuke
Department of Energy Sciences, Tokyo Institute of Technology
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MOHANTY Smruti
Centre of Plasma Physics, Sonapur
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YASUOKA Koichi
Department of Electrical and Electronic Engineering, Tokyo Institute of Technology
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HORIOKA Kazuhiko
Department of Energy Sciences, Tokyo Institute of Technology
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Hotta E
Dep. Of Energy Sciences Tokyo Inst. Of Technol.
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Okino A
Department Of Energy Sciences Tokyo Institute Of Technology
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Hotta E
Department Of Energy Sciences Tokyo Institute Of Technology
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Watanabe M
Department Of Energy Sciences Tokyo Institute Of Technology
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Horioka K
Tokyo Institute Of Technology
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