A Collective Laser Thomson Scattering System for Diagnostics of Laser-Produced Plasmas for Extreme Ultraviolet Light Sources
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概要
- 論文の詳細を見る
To develop a diagnostic system for laser-produced plasmas for extreme ultraviolet (EUV) light sources, collective laser Thomson scattering (LTS) was applied to laser-produced carbon plasmas to measure plasma parameters such as electron density (n_{\text{e}}) and electron temperature (T_{\text{e}}). Plasmas having parameters necessary for an EUV light source (n_{\text{e}} = 10^{24}{\mbox{--}}10^{25} m<sup>-3</sup>, T_{\text{e}} = 30{\mbox{--}}50 eV) were achieved, and these parameters were successfully evaluated by a pilot diagnostic system with errors below 10%. From these results, an LTS system for diagnostics of tin plasmas for real EUV light sources was designed.
- 2013-07-25
著者
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Inoue Kazuya
Interdisciplinary Graduate School of Engineering and Sciences, Kyushu University, Kasuga, Fukuoka 816-8580, Japan
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Tomita Kentaro
Interdisciplinary Graduate School of Engineering and Sciences, Kyushu University, Kasuga, Fukuoka 816-8580, Japan
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Uchino Kiichiro
Interdisciplinary Graduate School of Engineering and Sciences, Kyushu University, Kasuga, Fukuoka 816-8580, Japan
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SUNAHARA Atsushi
Institute for Laser Technology
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Sunahara Atsushi
Institute for Laser Technology, Suita, Osaka 565-0871, Japan
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Nakayama Kazuki
Interdisciplinary Graduate School of Engineering and Sciences, Kyushu University, Kasuga, Fukuoka 816-8580, Japan
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