Measurements of Electron Temperature and Density of a Micro-Discharge Plasma Using Laser Thomson Scattering

概要

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Laser Thomson scattering was successfully applied to measure electron temperature ($T_{\text{e}}$) and electron density ($n_{\text{e}}$) in a micro-discharge plasma. This is the first time that this method has been used to obtain otherwise inaccessible plasma information from the near vicinity (0.3 mm) of a material surface. The key of the success was the suppression of strong stray laser light by using a triple-grating spectrometer. Values of electron temperature and density were $T_{\text{e}}=(0.4\text{--}1.6)$ eV and $n_{\text{e}}=(6\text{--}10)\times 10^{18}$ m-3, depending on the time from the beginning of the pulsed discharge. The technique developed here is readily applicable to plasma display panel (PDP) discharges.
Publication Office, Japanese Journal of Applied Physics, Faculty of Science, University of Tokyoの論文
2001-01-15