ArF Excimer Laser Operated at 10 kHz with Small Electrode Separations
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概要
- 論文の詳細を見る
- 2013-07-15
著者
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UCHINO Kiichiro
Interdisciplinary Graduate School of Engineering Sciences, Kyushu University
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Uchino Kiichiro
Interdisciplinary Graduate School of Engineering and Sciences, Kyushu University, Kasuga, Fukuoka 816-8580, Japan
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ISHIHARA Takanobu
EUV Development Division, Gigaphoton Inc.
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HORI Tsukasa
EUV Development Division, Gigaphoton Inc.
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KAKIZAKI Kouji
Leaser Development Division, Gigaphoton Inc.
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- ArF Excimer Laser Operated at 10 kHz with Small Electrode Separations